do=0.0 5 mm 4. [20%] Consider the following capacitive accelerometer. Assume the overlapping area between the proof mass and substrate is 1cm x 1cm, the distance d₁= 0.05 mm, and 1 atm air (760 mm Hg) is between the proof mass and substrate. (1) Calculate the pull-in voltage; (2) Estimate the breakdown voltage using Paschen Curve (hint: the unit of the horizontal axis of Paschen curve is mm Hg ´ mm; calculate P'd for this problem and find the corresponding voltage from the curve). m k www m K=1000N/m

Fig: 1