Question 2 (15 marks) In a microsystem, small products comprised of even smaller parts and subassemblies are designed and fabricated. The terminology of microsystem technology lies in the dimension of 100

nm to 100 μm and normally observed by an optical microscope. Microsystem is commonly fabricated by silicon layer technologies such as LIGA and precision machining processes. a) There are four devices in a microsystem. Identify all FOUR devices in such a system. (4 marks) (8 marks) b) Elaborate each of the device you answered in 2a). c) Microsystem is commonly fabricated by silicon layer technologies such as LIGA and precision machining processes. Differentiate these processes in your own words. (3 marks)