Question

3)

a) How does SIMS Instrumentation work? Give a detail.

b) What are the strengths and limitations of SIMS?

c) Interpret the following SIMS graph for different salts.

10%

10⁰

Intensity (Counts)

10⁰

10²

10¹

10⁰%

film Substrate

pH 2

-OH

MgO

-ZnO

-Mg

-MgO,H

-Zn²

Zn

1000 2000 3000 4000 5000 6000

Sputtering time (seconds)

Question image 1