Question

Question 2 - a

Silicon crystal growth relies on a high temperature melt process, in which a seed crystal of Si is pulled out of molten Si while cooling to form a single crystal structure. To increase through-put of Si crystal boules your boss wants you to install a temperature sensor to measure the liquid silicon melt and implement PID temperature control in this Czochralski process. As the system is, the furnace currently takes ~1.5 hours to heat up, as simulated by the settling time of a step response. This system can be modelled by the heat exchanger relationship shown below with the associated physical parameters required to model the system

using Matlab.

a) Using the system defined on below (Q), implement control terms in Matlab to minimize the

amount of time it takes the furnace to heat up. Did you have to use all PID terms?

b) Explain how the addition of each term changes your system response, and discuss the

relationship between the magnitude of your values chosen, and their subsequent impact on: