(a) Make a flow chart for fabrication process of SINX membrane shown in picture (a). (b) If you want to make a 2 mm x 2 mm SİNX membrane, what

is the opening area in back side? How long does it take to etch? (c) If you want to make a 2 mm x 4 mm SiNx membrane, what is the opening area in the backside? How long does it take to complete the etching? (d) If you want to keep 2 um thick Si film beneath the 2 mm x 2 mm SİNX membrane,what will you do? Give the etching time too.